Spare Parts

 

Al2O3 Parts

Al2O3 Parts

YERICO MANUFACTURING has secured Slip Casting and CIP (Cold Isocratic Pressing) technology for mass production of high purity (99.8%) ceramic products such as focus ring, edge ring, ring confinement cap, etc. Due to the mass production and customization, our ceramic products ensure high performance with reasonable price that meet every customer’s needs.

Silicon Parts

Silicon Part

YERICO MANUFACTURING is the number one manufacturer of semiconductor silicon parts in South Korea and it has expanded its proven technology worldwide. The excellence of the silicon parts is due to Solmics’ advanced polishing and etching processes as well as production of silicon ingots. Our semiconductor silicon parts include focus rings, edge rings, source rings, inner rings, heat shields, etc.

Si-SiC Part

Si-SiC Part

YERICO MANUFACTURING is the number one manufacturer of semiconductor silicon parts in South Korea and it has expanded its proven technology worldwide. The excellence of the silicon parts is due to Solmics’ advanced polishing and etching processes as well as production of silicon ingots. Our semiconductor silicon parts include focus rings, edge rings, source rings, inner rings, heat shields, etc.

Quartz Part

Quartz Part

Our highly pure Si-SiC tubes and boats have been stabilized in high temperatures over 1,200℃ using an ultra-pure reaction sintering method, which significantly contributes to the improvement of the semiconductor diffusion process and LPCVD processes. It has also made 300mm wafer heat treatments highly pure and heat resistant.