Etch

Surplus Etch Parts

Search by OEM Number/Description/Department/Supplier’s Name
New/usedPictureMaterial DescriptionPart OEM NumberQTYSupplier's Name
NEWROBOT1087482BROOKS AUTOMATION
USEDSeal Ring(Pendulum)2032172VAT
NEWPLATE, VATTERFLY PLATE, VULCANIZED36947710VAT INCORPERATION
NEWAMPLIFIER-ETC;1914590,RF AMPLIFIER19145901
NEWQuartz insulator6999817141
USEDAMAT PRODUCER 12 ESC0010-247748
NEWWINDOW,Enabler; Large Wind001-05506-3022ENGINEERED SEMICONDUCTOR PRODUCTS
NEWWINDOW, Enabler; Sideview(s001-05507-30216ENGINEERED SEMICONDUCTOR PRODUCTS
NEWWINDOW, Enabler Window; Sid001-05508-3028ENGINEERED SEMICONDUCTOR PRODUCTS
USEDLower Liner0020-525018
USEDSLD0020-529652
USEDRF Screen - Y2O3 Coated0020-8779110
USEDCathode Liner0020-8784511
USEDLower Liner - Y2O3 Coated0020-8787611
USEDSlit Door Liner - Y2O3 Coated0020-8973912
NEWSHIM, EPD SPACER,VESPEL0021-255521APPLIED MATERIALS, INC.
SOLD OUTCathode Liner0021-262751
USEDSlit liner Door0021-278838
USEDCathode Liner0021-341968
SOLD OUTLiner Lower Spool0021-427641
NEWPIN-LOCATE, SHIN Rubber She003-05536-30217BTVY ENGINEERED SEMICONDUCTOR PRODUCTS
NEWE-MAX SiC SHOWERHEAD(BONDED)0040-125512
USEDUpper Liner - Y2O3 Coated0040-3764211
NEWManifold input. Lid Assembly(Vat valve Motor)0040-540981
USEDENABLER SiC SHOWERHEAD0040-7824411
USEDSlit Valve Door0040-789877
USEDCathode Liner0040-833312
USEDStandard upper liner0040-834022
USEDE-MAX SiC SHOWERHEAD0040-870476
USEDWall Liner0040-872193
USEDAMAT PRODUCER Y2O3 SHOWERHEAD 120040-879588
SOLD OUTUpper Chamber0040-883401
NEWChamber Liner (Left)0040-995481
USEDChamber Liner (Left)0040-995485
USEDChamber Liner (Right)0040-995495
USEDStandard Baffle0041-033448
NEWAMAT SHOWERHEAD(SiC TOP ELECTRODE)0041-615111
USEDVAT controller box012-007951-11
NEWCABLE, BIAS RIGHT HARNESS ASSY0140-129701APPLIED MATERIALS, INC.
USEDHeated Extenede Bell Interlock0190-290592
NEWPCB, Producer, Personality PCB0190-373533APPLIED MATERIALS, INC.
SOLD OUTScrew Cover Ceramic0200-0093310
USEDQuartz Insulator Ring0200-02542S10
NEWQuartz Insulator Ring0200-02542S1Applied Materials
USEDIon Port Cover0200-027961
USEDQtz Insulator Pipe0200-029258
USEDInsulator External With Lip, Ceramic0200-036918
USEDInner Insulator, Ceramic0200-038375
USEDRough port Insert0200-039213
USEDRough port Insert cover0200-040224
USEDQtz Outer Ring0200-042206
USEDQtz Bottom Ring0200-043173
NEWRING, SINGLE RING, REV.10200-04619(S)32WONIK QNC
USEDQtz Bottom Ring0200-048265
USEDNozzle Insert0200-063951
USEDCeramic Lid(Dual Gas)0200-064051
USEDLid, Bulk Yttria0200-066155
USEDYttria Gas Nozzle0200-071024
USEDInsulator Pipe - Quartz0200-3603410
SOLD OUTSlit Valve Door0200-636681
NEWPIN-HOLDER;0246-01192,Alumina,5mm Puck0246-011923APPLIED MATERIALS, INC.
NEWRING, SHIN 59Deg Tight ID,DST1AT9S00922(주)아이마켓코리아
USEDRF source cable263-21681-026
NEWSHIELD,TOP-HS2L05-250043-116TOKYO ELECTRON AMERICA, INC.
NEWRING, INSULATOR SIR FLAT Q2L05-350047-1111TOKYO ELECTRON AMERICA, INC.
USEDRing Under Si2L10-250490-118
NEWCell, Outer (Used)2L10-251343-211
NEWCell, Inner (Used)2L10-251343-212TEL
USEDBreak Out boxes (pin out)2L80-000212-137
USEDShutter2L80-000618-16
USEDIntegrated Controller Comp364362/00351
NEWBOLT, POWER BOLT3870-036962APPLIED MATERIALS, INC.
USEDVAT Gate valve3870-043441
SOLD OUTInsulator, Sandwich (TEL)3D05-250012-112
SOLD OUTRing, BTM Shield3D10-100844-1114
SOLD OUTPlate, Exhause (TEL)3D10-100845-111
SOLD OUTShutter3D10-101152-1313
SOLD OUTShield, DEPO (TEL)3D10-101194-126
SOLD OUTPlate, Shield3D10-150123-1212
USEDSeperator Lower3D10-150802-111
USEDPlate, Cooling Outer3D10-202392-111
USEDSpacer ring (TEL)3D10-250319-116
USEDWindow Depo, CLP3D10-302734-1210
NEWSHEET, SHEET,OUTER CP RING3D10-351388-113TOKYO ELECTRON AMERICA, INC.
USEDBLOCK, SHAFT HOLDER H373D10-404361-117
USEDPN, LOCATION, TE.. RUBBER SHEET3D10-404479-126
USEDBLOCK,CEL BUSH ADJUSTER3D10-450534-111
USEDBLOCK,CEL BUSH CHECKER 0.43D10-450535-111
USEDBLOCK, CEL BUSH CHECKER 0.63D10-450536-111
USEDCPI control box and hardware3D80-001918-123DAIHEN CORP.
USEDCPI controller box(MDM-01A)3D80-001919-113DAIHEN CORP.
USEDESC removal jigs3D87-001413-155
USEDPOST(M6) FIXTURE ASSY3D87-002982-134
USEDPOST(M5) FIXTURE ASSY3D87-002984-124
USEDWET Clean part removal Jigs - DEPO3D87-005561-124
USEDFICTURE ASSY, GAUGE SHUTTER3D87-005634-111
USEDWET clean part removal jigs - OC3D87-005776-114
USEDWET clean part removal jigs-IC3D87-005777-127
USEDIC Alignment Jig3D87-052323-113
USEDOC Cell Alignment Jig3D87-052324-114
USEDARM FIXTURE3M80-002314-115
USED(TRIAS) TI SHOWERHEAD3M87-053059-112
NEWFILTER3ROT1214854ENTEGRIS INC.
NEWAir N2 Regulator5082-11000302
NEWSupra3 TM Robot blade - New5160-04198-E2
NEWBuffer Pins, Fixed Side5160-31008-B6
NEWDOOR, Simriz SZ486,Bonded62SP00246-11AUSTIN SEAL COMPANY
NEWAPC Valve653B-4-100-21
USEDTCP Generator660-032596-21313APEX
USEDBias Generator660-032596-21415APEX
NEWNotch Plug on Top of GDP713-026330-00425
NEWBLOCK-PAD713-040539-101(A)6ATX Environmental Solutions LLC
USEDMetal Door Liner714-023790-0042
USEDMetal MTGPL714-044693-0021
USEDOuter Liner714-045743-80931
USEDCantilever Outer Liner Mount714-045744-00832
USEDOuter Liner714-04743-8092
NEWChamber Liner715-003860-0041LAM
USEDChamber Liner715-003860-0055
USEDGDP715-027638-81435
USEDChamber Liner715-030860-00111
USEDFlex45 Chamber Liner715-030860-00317
NEWFlex45 Chamber Liner715-030860-0032
USEDInner Liner (Y2O3 + WEB)715-042721-81031
SOLD OUTMetal Bottom Chamber Liner715-044691-0024
USEDOuter Liner Mounting Block715-048335-00935
USEDShim Plate715-072985-0036
USEDCeramic Window716-003481-81523
SOLD OUTQuartz Injector716-012639-0249
SOLD OUTCeramic Injector716-012639-12510
USEDCeramic Gas Injector716-012639-12522
USEDY2O3 Bottom Edge Ring716-026652-832142
USEDCeramic Coupling Ring716-040737-40288
NEWRING, RING,DFG MOD, 1-ROW716-049806-0016
NEWRING, Ring DGF MOD 1-Ro716-049806-001(S)5
NEWRING716-072575-4501
NEWPIN, PICK UP, DC BIAS, SI CARB,73-3013882
NEWRING, FOCUS73-301628
NEWRING, CONF, INNER BYPASS, 300MM,73-3016439
NEWRING,CONFINEMENT RING TOP, 716-73-3016626
USEDBias RF Match832-031915-00114APEX
USEDTCP Generator832-038918-0011
USEDCover Ring83-301371WCQ
USEDFocus Ring83-30182-C2WCQ
NEWELECTRODE839-020965-0073
USEDGasline Weldment839-031197-0045
SOLD OUTGas Line Weldment839-031197-1036
USEDMetal Bottom Liner839-044692-0021
USEDMetal RF TCCT Coil853-031436-2051
USED853-039372-0014LAM
USEDAC Enclosure853-800083-6015LAM
NEWCABLE, DAIFUKU VEHICLE,ASSYADW081845
USEDCPI Comet CapsCVHE-200AC/15-GJAA-AH3COMET
NEWCM1 manometers - NewES008521-12
USEDCM1 manometers - needs refurbES008521-11
NEWPINES026-009839-11TOKYO ELECTRON AMERICA, INC.
USEDFocus RingES2010-250745-11(S)1SNT
USEDWindow(Q), Blank EPD V2ES2L05-350012-111
USEDPlate(L), D3T6 Exhause V2ES2L10-150173-126
USEDUnder shield depo G30 V2EES2L10-150465-143
NEWPlate(L), D3T6 Exhause V2ES2L10-150546-111
USEDCell, Inner (Used)ES2L10-251342-113
USEDRing, Under AL 12HES2L10-251794-113
USEDWindow(Y1-E), shield DEPO V2ES2L10-350757-113
USEDShield DEPO..Shield DEPO(HEAT)ES2L80-000633-14
NEWShield DEPO..Shield DEPO(HEAT)2L10-150839-111TEL
NEWSEPARATOR;ES3D10-150082-11,Seperator, LoES3D10-150082-113
NEWFLAT CELL, CEL,ES3D10-250317-1122
NEWWASHER, Washer, CP-UEL MES3D10-450972-1132
NEWPIN, DS FIXTURE-D NUT(W)ES3D10-451272-112TOKYO ELECTRON AMERICA, INC.
NEWPIN, DS FIXTURE-D NUT(W)ES3D10-451336-112TOKYO ELECTRON AMERICA, INC.
USEDShield, DEPO (KOMICO)KTI-003-0015-1Y2
USEDPlate, Exhause (Komico)KTI-003-0026-1Y8
NEWINSERT, 0200-03233(S)S-36528
NEWRING;S-3653,0200-04273(S),EMAX INSERT RIS-365324
NEWCOLLAR;S-3845,TOPS-38454
USEDTop Edge RingS-60726
USEDYAG Bottom Edge RingS-609227
USEDTop Edge RingS-60926
USEDYAG Bottom Edge RingS-6092122
NEWPIPE FITTING;SS-400-2-6ST,1/4" ID,SS,PSKSS-400-2-6ST4Swagelok Austin/Corpus Christi
USEDSTP-XA2703CV(R),TURBO PUMP REPAIRTURBO PUMP REPAIR1
NEWO-RING;UA4640 AS253,UA,734-046356-253,ASUA4640-AS2535
USEDInsulator, Sandwich (WCQ)1
USEDSpacer ring (WCQ)5WCQ
USEDlocking ring1
USEDRF cables (rec brownish)2
NEWBuffer Pins, Moving Side2
USEDLiner Top1
USEDCathode Liner1
NEWDOOR;012-00259-041,Rocker door,Gate O-Ri012-00259-041
2NUCO INC.
NEWO-RING;5641-1643-SC657,VAT Bonnet5641-1643-SC6572
NEWROBOT;9701-2820-029701-2820-021IMK / Samsung C&T America, INC.
USEDChamber Liner715-030860-0059