RF/RPS Repair List

RF/RPS Repair List
DivisionMakerModel Name
RF GeneratorMKSOEM-6, OEM-12B, OEM-25, OEM-28 PL-3G, OEM-650A, OEM-1250, OEM-2000, OEM-50,
GMW-25A, LPG-12A, GHW-25 PL-2HF, GHW-50 GMW-50A
NOVA-50, PL-2HF, LPG-12A
Genesis Series, ACG6B
AERF-5S, RF-10S, PF-20, RF-30S, RF-20R, LF-5, LF-10A, RFDA-1250, MDX-L12M-650
APEX-Series, PDX Series, RFG Series,
DAIHENMFG-15SA, MFG-20SA, WGA30-A, AGA-27B, WGA-50E, AGA-50B
ADTECAX500, AX1000, AX2000, AX2000, AX5000, A7500, AX10000
COMDELCPS-1001/1001S, CX-600, CDX-2000, CLX-2500, CLX-1250, CLF-5000, CPS-500AS, CB-250, CX-1250 and etc.
Pearl kogyoLP-15-800K, LP-500-800K, LP-200800K,
PR-150-2M, PR-300-2M, PR-300-1356, PR-3000-27M and etc
AIXCON MicrowaveAIXCON 2000
RF MatchAMATPoly, HE Oxide, DPS, Oxide, HE Metal, Metal, CVD, PVD, SIDE, Vectra
AETCP TOP, TCP Bottom
MKS(ENI)MWD-25LD, MHW-25-04, MWM-25
ASTeXRF-1000, RF-1000S
REPP7622388010, AM SERIES
RPSMKS
2L(0.1~2 slm NF3)
AX7650, AX7651, AX7651-2, AX7657, AX7657-2, AX7657-5, AX7657-7
FI20620-1
MKS
3L(0.1~3 slm NF3)
AX7670, AX7670-02, AX7670-12, AX7670-06, AX7670-16, AX7670-16R, AX7670-19, AX7670-21, AX7670-60
MKS
4L(0.5~4 slm NF3)
AX7680
MKS
6L(0.5~6 slm NF3)
FI80131, FI80131-C
AX7685, AX7685-01
MKS
15L(UP to 15 slm NF3)
FI80146, FI80146-1, FI80146-R
AX7640, AX7645-RH, AX7645-PS
MKS
22L(6~15 slm NF3)
AX7635, AX7635-02, AX7635-02-R, AX7635-03
MKS
30L(15~30 slm NF3)
AX7665-01