Silicon Carbide(SiC)

SiC Parts

Upper Ring, Baffle, PEC, Holder Cap

 

 

Sic

 

The ring type jig and cathodes for etch process have been replaced with SiC which has significantly improved the lifetime as well as reduce the cost.  Its anti-corrosiveness and high thermal conductivity characteristics has made SiC one of the most promising materials in the semiconductor industry.