We provide spare parts for 200mm and 300mm heaters or refurbish your old one.

  • AMAT WxZ, DxZ, TxZ and Endura
  • Novellus: C1/C2 Sequel, Altus and Vector
  • Gasonics Platen

New Heaters and Refurbishments will be tested for:

  • Dimensions (Flatness, Diameter, Thickness, and Groove depth).
  • Electrical (Insulation/Heater Resistance and Withstanding Voltage)
  • He Leak Test
  • Temperature Trend by Pressure
  • Temperature Ramp-Up Trend