ESC (Electrod Static Chuck)

 

ESC-1

 

 

ESC-2

 

We provide spare parts for ESC or refurbish your old one to as new condition.

  • AMAT: Ultima, DPS, DPS2, e-max, super-e, MxP, MxP+, Producer
  • LAM: 4500, 2300, 9400 and 9600 series
  • Novellus: Speed
  • TEL: DRM and SCCM (Ceramic Coated and Ceramic Plated)
  • Varian
  • Hitachi
  • Trikon
  • Ulvac

New ESCs and Refurbishments will be tested for:

  • Ultra Sonic imaging of plate and bonding
  • Flatness
  • Dimple Height
  • Dimension
  • He Leak Rate
  • Withstanding Voltage
  • Chucking/Dechucking